......DE......GB..IT............................................................JDIM360 Ver 2.15 (14 Jul 2008) - 2999001/01178524CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120090408W173deBibliographieenBibliographyfrBibliographieEP00987690.52000122120010918jaenen3649189919991222JP200025663220000828JP2009040820091520020206200206200901072009022008070720090408200915H01L 21/301 20060101AFI20010703BHEP H01L 35/32 20060101ALI20010703BHEP H01L 27/14 20060101ALI20010703BHEP deMETHODE ZUR ERZEUGUNG VON CHIPS AUS DÜNNEN PLÄTTCHEN PYROELEKTRISCHEN MATERIALSenMETHOD FOR FABRICATING DEVICE CHIPS FROM THIN SHEET OF PYROELECTRIC MATERIALfrPROCEDE DE FABRICATION DE PUCES DE DISPOSITIF A PARTIR D'UNE FEUILLE MINCE DE MATIERE PYROELECTRIQUEJP-A- 7 174 621JP-A- 10 002 793JP-A- 55 107 27320080227Nishimura, Makotoc/o Matsushita Elec. Works, Ltd 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPKimura, Kenichic/o Matsushita Elec. Works, Ltd 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPMiyagawa, Nobuyukic/o Matsushita Elec. Works, Ltd 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPKawashima, Masatoc/o Matsushita Elec. Works, Ltd 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPNakamura, Yoshimitsuc/o Matsushita Elec. Wks Ltd 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPIkari, Motooc/o Matsushita Elec. Works, Ltd. 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPTakada, Yujic/o Matsushita Elec. Works, Ltd. 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPTaniguchi, Ryoc/o Matsushita Elec. Works, Ltd 1048 Oaza-KadomaKadoma-shi, Osaka 571-8686JPPanasonic Electric Works Co., Ltd.08866230EPA - 387431048 Oaza KadomaKadoma-shi OsakaJPStrehl Schübel-Hopf & Partner00100941Maximilianstrasse 5480538 MünchenDEDEGBITJP200000910420001221jaWO20010470042001062820012620020206200206