(19)
(11) EP 1 179 749 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.01.2004 Bulletin 2004/05

(45) Mention of the grant of the patent:
08.10.2003 Bulletin 2003/41

(21) Application number: 01118916.4

(22) Date of filing: 03.08.2001
(51) International Patent Classification (IPC)7: G03F 7/004, G03F 7/038, G03F 7/039

(54)

Resist composition and method for manufacturing semiconductor device using the resist composition

Resistzusammensetzung und Verfahren zur Herstellung von Halbleiterbauelementen

Composition de photoréserve et méthode de fabrication d'un dispositif semi-conducteur

(84) Designated Contracting States:
DE FR

(30) Priority: 11.08.2000 JP 2000244161

(43) Date of publication of application:
13.02.2002 Bulletin 2002/07

(73) Proprietors:
  • Semiconductor Leading Edge Technologies, Inc.
    Ibaraki-ken, 305-0053 (JP)
  • IDEMITSU PETROCHEMICAL CO., LTD.
    Tokyo 130-0015 (JP)

(72) Inventors:
  • Toriumi, Minoru, Semicond. Lead. Edge Tech. Inc
    Ibaraki-ken, 305-0053 (JP)
  • Satou, Isao, Semicond. Lead. Edge Tech. Inc.
    Ibaraki-ken, 305-0053 (JP)
  • Watanabe, Hiroyuki, Semicond. Lead. Edge Tech. Inc
    Ibaraki-ken, 305-0053 (JP)
  • Katai, Shunji, c/o Idemitsu Petrochem. Co., Ltd.
    Tokyo 130-0015 (JP)
  • Suzuki, Shintaro, Idemitsu Petrochem. Co., Ltd.
    Tokyo 130-0015 (JP)

(74) Representative: Prüfer, Lutz H., Dipl.-Phys. et al
PRÜFER & PARTNER GbR, Patentanwälte, Harthauser Strasse 25d
81545 München
81545 München (DE)


(56) References cited: : 
EP-A- 0 540 032
EP-A- 1 126 320
US-A- 6 124 074
 EP-A- 1 067 112
US-A- 5 968 713
   
  • PATENT ABSTRACTS OF JAPAN vol. 1998, no. 02, 30 January 1998 (1998-01-30) -& JP 09 265177 A (NEC CORP), 7 October 1997 (1997-10-07)
  • PATENT ABSTRACTS OF JAPAN vol. 017, no. 498 (P-1609), 8 September 1993 (1993-09-08) -& JP 05 127370 A (FUJI PHOTO FILM CO LTD), 25 May 1993 (1993-05-25)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).