| (84) |
Designated Contracting States: |
|
CH DE FR IT LI |
| (30) |
Priority: |
11.08.2000 GB 0019848
|
| (43) |
Date of publication of application: |
|
27.02.2002 Bulletin 2002/09 |
| (60) |
Divisional application: |
|
04076753.5 |
| (73) |
Proprietor: Satis Vacuum Industries Vertriebs - AG |
|
6340 Baar (CH) |
|
| (72) |
Inventor: |
|
- Gibson, Desmond
Holme,Peterborough PE7 3PJ (GB)
|
| (74) |
Representative: Curtis, Philip Anthony |
|
A.A. Thornton & Co.,
235 High Holborn
London WC1V 7LE
London WC1V 7LE (GB) |
| (56) |
References cited: :
EP-A- 0 328 257
GB-A- 1 177 081
US-A- 4 776 299
US-A- 5 490 912
US-A- 5 879 519
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DD-A- 282 364
US-A- 4 640 334
US-A- 5 296 122
US-A- 5 618 388
US-A- 6 010 600
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| |
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- DATABASE INSPEC [Online] INSTITUTE OF ELECTRICAL ENGINEERS, STEVENAGE, GB; FUJIMOTO
T ET AL: "An ultrahigh vacuum sputtering system with offset incidence magnetron sources
onto a rotating substrate" Database accession no. 6415002 XP002217212 & REVIEW OF
SCIENTIFIC INSTRUMENTS, NOV. 1999, AIP, USA, vol. 70, no. 11, pages 4362-4365, ISSN:
0034-6748
- DATABASE INSPEC [Online] INSTITUTE OF ELECTRICAL ENGINEERS, STEVENAGE, GB; WRIGHT
M P: "Post magnetron sputter and reactive sputter coating of contoured glass, acrylic
and polycarbonate substrates" Database accession no. 2857142 XP002217213 & OPTICAL
MATERIALS TECHNOLOGY FOR ENERGY EFFICIENCY AND SOLAR ENERGY CONVERSION IV, SAN DIEGO,
CA, USA, 20-22 AUG. 1985, vol. 562, pages 269-274, Proceedings of the SPIE - The International
Society for Optical Engineering, 1985, USA ISSN: 0277-786X
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