(19)

(11)

EP 1 185 829 A1

(12)

(43) Date of publication: 13.03.2002 Bulletin 2002/11 (21) Application number: 00939665.6 (22) Date of filing: 08.06.2000

(51) International Patent Classification (IPC)7: F24J 2/06, F24J 2/10, H01L 31/052 (86) International application number: PCT/US0015/726 (87) International publication number: WO 0077/458 (21.12.2000 Gazette 2000/51)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 10.06.1999 GB 9913466 (71) Applicant: 3M Innovative Properties Company Saint Paul, MN 55133-3427 (US)	(72) Inventor: LEA, Michael C. WarfieldBracknell, Berkshire RG42 3XQ (GB) (74) Representative: Hill, Cecilia Ann et al Office of Intellectual Property Counsel,3M Europe S.A./N.V.,Hermeslaan 7 1831 Diegem 1831 Diegem (BE)