METHOD OF FABRICATING A SEMICONDUCTOR DEVICE - Patent 1185894

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EP 1 185 894 A1

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(43)	Date of publication:
	13.03.2002 Bulletin 2002/11

(21)	Application number: 00937038.8

(22)	Date of filing: 02.06.2000

(51)	International Patent Classification (IPC)⁷: G02B 6/132

(86)	International application number:
	PCT/GB0002/145

(87)	International publication number:
	WO 0077/548 (21.12.2000 Gazette 2000/51)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

14.06.1999 GB 9913713
03.08.1999 GB 9918097

(71)	Applicant: QinetiQ Limited
	London, SW1 6TD (GB)

(72)	Inventors:
	MARTIN, Trevor,DERA Malvern Worcestershire WR14 3PS (GB) BALMER, Richard, Stuart,DERA Malvern Malvern,Worcestershire WR14 3PS (GB) AYLING, Stephen, Gerard,DERA Malvern Malvern,Worcestershire WR14 3PS (GB) MACLEAN, Jessica, Owens,DERA Malvern Malvern,Worcestershire WR14 3PS (GB) HEATON, John, Michael,DERA Malvern Malvern,Worcestershire WR14 3PS (GB)

(74)	Representative: Bowdery, Anthony Oliver et al
	D/IP QinetiQ Formalities,A4 Bldg.,Ively Road Farnborough,Hampshire GU14 0LX Farnborough,Hampshire GU14 0LX (GB)

(54)	METHOD OF FABRICATING A SEMICONDUCTOR DEVICE