(19)
(11) EP 1 188 173 A1

(12)

(43) Date of publication:
20.03.2002 Bulletin 2002/12

(21) Application number: 00944622.0

(22) Date of filing: 07.06.2000
(51) International Patent Classification (IPC)7H01J 9/14
(86) International application number:
PCT/US0015/601
(87) International publication number:
WO 0077/815 (21.12.2000 Gazette 2000/51)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 11.06.1999 US 330697

(71) Applicant: Thomson Licensing S.A.
92648 Boulogne Cedex (FR)

(72) Inventors:
  • ESHLEMAN, Craig, Clay
    Pequea, PA 17565 (US)
  • WETZEL, Charles, Michael
    Lititz, PA 17543 (US)
  • MCCOY, Randall, Eugene
    Little Falls, NJ 07424 (US)

(74) Representative: Ruellan-Lemonnier, Brigitte et al
THOMSON multimedia,46 quai A. Le Gallo
92648 Boulogne Cédex
92648 Boulogne Cédex (FR)

   


(54) METHOD UTILIZING A MAGNETIC ASSEMBLY DURING ETCHING THIN SHADOW MASKS