(19)

(11)

EP 1 188 179 A2

(12)

(88) Date of publication A3: 03.01.2002 (43) Date of publication: 20.03.2002 Bulletin 2002/12 (21) Application number: 00986719.3 (22) Date of filing: 22.12.2000

(51) International Patent Classification (IPC)7: H01L 21/28 (86) International application number: PCT/US0035/130 (87) International publication number: WO 0150/504 (12.07.2001 Gazette 2001/28)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 30.12.1999 US 475333 (71) Applicant: Koninklijke Philips Electronics N.V. 5621 BA Eindhoven (NL)	(72) Inventors: HALEY, Mark, W. Rio Medina, TX 78066 (US) PARKS, Delbert San Antonio, TX 78240 (US) (74) Representative: Duijvestijn, Adrianus Johannes  Internationaal Octrooibureau B.V.,Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)