ELECTROSTATIC MICROACTUATOR WITH OFFSET AND/OR INCLINED COMB DRIVE FINGERS - Patent 1188225

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EP 1 188 225 A1

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(43)	Date of publication:
	20.03.2002 Bulletin 2002/12

(21)	Application number: 00923312.3

(22)	Date of filing: 12.04.2000

(51)	International Patent Classification (IPC)⁷: H02N 1/00

(86)	International application number:
	PCT/US0009/919

(87)	International publication number:
	WO 0062/410 (19.10.2000 Gazette 2000/42)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

12.04.1999 US 128764 P
15.12.1999 US 464361

(71)	Applicant: Seagate Technology LLC
	Scotts Valley, CA 95067-0360 (US)

(72)	Inventors:
	GRADE, John, D. Mountain View, CA 94043 (US) JERMAN, John, H. Palo Alto, CA 94306 (US)

(74)	Representative: Kenyon, Sarah Elizabeth et al
	Miller Sturt Kenyon9 John Street London WC1N 2ES London WC1N 2ES (GB)

(54)	ELECTROSTATIC MICROACTUATOR WITH OFFSET AND/OR INCLINED COMB DRIVE FINGERS