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(11) | EP 1 189 275 A8 |
(12) | CORRECTED EUROPEAN PATENT APPLICATION |
published in accordance with Art. 158(3) EPC |
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(54) | SUBSTRATE TRANSFER DEVICE |
(57) In this substrate transport apparatus, portions connecting a transport chamber (101)
with a first load-lock chamber (109) and a second load-lock chamber (110) are provided
to linearly align with each other. A processing station (120,121) for processing a
substrate (400) is provided on a position not interfering with rotational motion and
telescopic motion of a robot arm (106). A substrate transport apparatus capable of
improving the degree of integration of the apparatus while suppressing enlargement
of a foot print and implementing common load-lock chambers can be provided by employing
this structure. |