(19)
(11) EP 1 189 275 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
published in accordance with Art. 158(3) EPC

(48) Corrigendum issued on:
11.09.2002 Bulletin 2002/37

(43) Date of publication:
20.03.2002 Bulletin 2002/12

(21) Application number: 01915813.8

(22) Date of filing: 26.03.2001
(51) International Patent Classification (IPC)7H01L 21/68
(86) International application number:
PCT/JP0102/450
(87) International publication number:
WO 0107/3840 (04.10.2001 Gazette 2001/40)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 29.03.2000 JP 2000091444

(71) Applicant: Daikin Industries, Ltd.
Osaka-shi, Osaka 530-8323 (JP)

(72) Inventor:
  • WADA, Sadayuki, Daikin Industries Ltd.
    Sakai-shi, Osaka 592-8331 (JP)

(74) Representative: Herrmann-Trentepohl, Werner, Dipl.-Ing. 
Patentanwälte Herrmann-Trentepohl Grosse - Bockhorni & Partner Forstenrieder Allee 59
81476 München
81476 München (DE)

   


(54) SUBSTRATE TRANSFER DEVICE


(57) In this substrate transport apparatus, portions connecting a transport chamber (101) with a first load-lock chamber (109) and a second load-lock chamber (110) are provided to linearly align with each other. A processing station (120,121) for processing a substrate (400) is provided on a position not interfering with rotational motion and telescopic motion of a robot arm (106). A substrate transport apparatus capable of improving the degree of integration of the apparatus while suppressing enlargement of a foot print and implementing common load-lock chambers can be provided by employing this structure.