(19)

(11)

EP 1 190 213 A1

(12)

(43) Date of publication: 27.03.2002 Bulletin 2002/13 (21) Application number: 99923100.4 (22) Date of filing: 14.05.1999

(51) International Patent Classification (IPC)7: G01B 11/24, G02B 26/10 (86) International application number: PCT/US9910/756 (87) International publication number: WO 0070/303 (23.11.2000 Gazette 2000/47)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (71) Applicant: 3DMetrics, Incorporated Petaluma, CA 94952 (US)	(72) Inventors: LU, Taiwei Rohnert Park, CA 94928 (US) ZHANG, Jianzhong State College, PA 16803 (US) (74) Representative: Ebner von Eschenbach, Jennifer et al Ladas & Parry,Dachauerstrasse 37 80335 München 80335 München (DE)