(19)
(11) EP 1 190 455 A2

(12)

(88) Date of publication A3:
17.01.2002

(43) Date of publication:
27.03.2002 Bulletin 2002/13

(21) Application number: 00919823.5

(22) Date of filing: 29.03.2000
(51) International Patent Classification (IPC)7H01L 31/00
(86) International application number:
PCT/US0008/340
(87) International publication number:
WO 0060/645 (12.10.2000 Gazette 2000/41)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 01.04.1999 US 283716

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventors:
  • LIU, Albert, H.
    San Antonio, TX 78240 (US)
  • VINES, Landon
    San Antonio, TX 78240 (US)

(74) Representative: Duijvestijn, Adrianus Johannes 
Internationaal Octrooibureau B.V.,Prof. Holstlaan 6
5656 AA Eindhoven
5656 AA Eindhoven (NL)

   


(54) DUAL CMP PAD CONDITIONER