(19)
(11) EP 1 192 656 A1

(12)

(43) Date of publication:
03.04.2002 Bulletin 2002/14

(21) Application number: 00943434.1

(22) Date of filing: 05.06.2000
(51) International Patent Classification (IPC)7: H01L 21/768
(86) International application number:
PCT/US0040/108
(87) International publication number:
WO 0101/480 (04.01.2001 Gazette 2001/01)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 30.06.1999 US 345586

(71) Applicant: INTEL CORPORATION
Santa Clara, CA 95052 (US)

(72) Inventors:
  • HUSSEIN, Makarem, A.
    Beaverton, OR 97007 (US)
  • MYERS, Alan, M.
    Portland, OR 97225 (US)
  • RECCHIA, Charles, H.
    Hillsboro, OR 97124 (US)
  • SIVAKUMAR, Sam
    Hillsboro, OR 97124 (US)
  • KANDAS, Angelo, W.
    Hillsboro, OR 97124 (US)

(74) Representative: Molyneaux, Martyn William 
Wildman, Harrold, Allen & Dixon11th Floor, Tower 3,Clements Inn,
London WC2A 2AZ
London WC2A 2AZ (GB)

   


(54) METHOD OF PROTECTING AN UNDERLYING WIRING LAYER DURING DUAL DAMASCENE PROCESSING