(19)
(11) EP 1 195 523 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
08.01.2003 Bulletin 2003/02

(43) Date of publication A2:
10.04.2002 Bulletin 2002/15

(21) Application number: 01128819.8

(22) Date of filing: 27.06.2000
(51) International Patent Classification (IPC)7: F04B 43/04, F15C 5/00
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 28.06.1999 US 141503 P
03.08.1999 US 147199 P
03.03.2000 US 186856 P

(62) Application number of the earlier application in accordance with Art. 76 EPC:
00305389.9 / 1065378

(71) Applicant: California Institute of Technology
Pasadena, California 92115 (US)

(72) Inventors:
  • Unger, Marc A.
    South San Francisco, California 94080 (US)
  • Scherer, Axel
    Laguna Beach, California 92651 (US)
  • Quake, Stephen R.
    San Marino, California 91108 (US)
  • Chou, Hou-Pu
    Sunnyvale, CA 94086 (US)
  • Thorsen, Todd A.
    Pasadena, California 91104 (US)

(74) Representative: Bizley, Richard Edward et al
Hepworth, Lawrence, Bryer & Bizley Merlin House Falconry Court Baker's Lane
Epping Essex CM16 5DQ
Epping Essex CM16 5DQ (GB)

   


(54) Microfabricated elastomeric valve and pump systems


(57) A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.






Search report