MICRO-ELECTROMECHANICAL DEVICES AND METHODS OF MANUFACTURE - Patent 1196349

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EP 1 196 349 A1

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(43)	Date of publication:
	17.04.2002 Bulletin 2002/16

(21)	Application number: 00945011.5

(22)	Date of filing: 29.06.2000

(51)	International Patent Classification (IPC)⁷: B81B 3/00

(86)	International application number:
	PCT/US0017/988

(87)	International publication number:
	WO 0100/523 (04.01.2001 Gazette 2001/01)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

29.06.1999 US 141413 P

(71)	Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA
	Minneapolis,Minnesota 55455-2070 (US)

(72)	Inventor:
	SCHILLER, Peter, J. Coon Rapids, MN 55433 (US)

(74)	Representative: Beresford, Keith Denis Lewis et al
	BERESFORD & Co.2-5 Warwick Court,High Holborn London WC1R 5DH London WC1R 5DH (GB)

(54)	MICRO-ELECTROMECHANICAL DEVICES AND METHODS OF MANUFACTURE