(19)

(11)

EP 1 196 350 A2

(12)

(88) Date of publication A3: 03.05.2001 (43) Date of publication: 17.04.2002 Bulletin 2002/16 (21) Application number: 00940221.5 (22) Date of filing: 28.06.2000

(51) International Patent Classification (IPC)7: B82B 1/00, H01L 21/02, H01L 21/18 (86) International application number: PCT/DK0000/348 (87) International publication number: WO 0100/522 (04.01.2001 Gazette 2001/01)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 28.06.1999 DK 91899 (71) Applicant: Mikroelektronik Centret (MIC) 2800 Lyngby (DK)	(72) Inventors: GREY, Hasin, François de Charmoy DK-1602 Copenhagen K (DK) FEIDENHANS'L, Robert, Krarup DK-4000 Roskilde (DK) VEDDE, Jan DK-3460 Birker d (DK) NIELSEN, Mourits DK-4000 Roskilde (DK) HOWES, Paul Bedford Hinckley,Leicestershire LE10 1LG (GB) (74) Representative: Plougmann & Vingtoft A/S  Sankt Annae Plads 11P.O.Box 3007 1021 Copenhagen K 1021 Copenhagen K (DK)