(19)
(11) EP 1 196 944 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
07.01.2009 Bulletin 2009/02

(45) Mention of the grant of the patent:
19.12.2007 Bulletin 2007/51

(21) Application number: 00947290.3

(22) Date of filing: 12.07.2000
(51) International Patent Classification (IPC): 
H01L 21/00(2006.01)
(86) International application number:
PCT/US2000/019027
(87) International publication number:
WO 2001/004935 (18.01.2001 Gazette 2001/03)

(54)

APPARATUS AND METHOD FOR TRANSFERRING A WORKPIECE

VORRICHTUNG UND VERFAHREN ZUM TRANSFERIEREN EINES WERKSTÜCKES

APPAREIL ET PROCEDE DE TRANSFERT D'UNE PIECE DE TRAVAIL

(84) Designated Contracting States:
DE FR

(30) Priority: 12.07.1999 US 351939

(43) Date of publication of application:
17.04.2002 Bulletin 2002/16

(73) Proprietor: FSI International, Inc.
Chaska, MN 55318-1096 (US)

(72) Inventors:
  • WAGENER, Thomas, J.
    Shorewood, MN 55331 (US)
  • PATRIN, John, C.
    Chanhassen, MN 55317 (US)
  • INHOFER, William, P.
    Plymouth, MN 55447 (US)
  • SIEFERING, Kevin, L.
    Excelsior, MN 55331 (US)

(74) Representative: Vossius & Partner 
Siebertstraße 4
81675 München
81675 München (DE)


(56) References cited: : 
US-A- 5 784 799
US-A- 5 820 692
 US-A- 5 810 942
   
  • PATENT ABSTRACTS OF JAPAN vol. 1998, no. 10, 31 August 1998 (1998-08-31) & JP 10 144757 A (DAINIPPON SCREEN MFG CO LTD), 29 May 1998 (1998-05-29)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).