ELECTRON BEAM PHYSICAL VAPOR DEPOSITION APPARATUS AND VIEWPORT THEREFOR - Patent 1198608

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EP 1 198 608 A1

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(43)	Date of publication:
	24.04.2002 Bulletin 2002/17

(21)	Application number: 00952447.1

(22)	Date of filing: 03.08.2000

(51)	International Patent Classification (IPC)⁷: C23C 14/30

(86)	International application number:
	PCT/US0021/175

(87)	International publication number:
	WO 0157/288 (09.08.2001 Gazette 2001/32)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

04.08.1999 US 147233 P
24.07.2000 US 621757

(71)	Applicant: GENERAL ELECTRIC COMPANY
	Schenectady, NY 12345 (US)

(72)	Inventors:
	BRUCE, Robert, William Loveland, OH 45140 (US) EVANS, John, Douglas, Sr. Springfield, OH 45502 (US) MARICOCCHI, Antonio, Frank Loveland, OH 45140 (US)

(74)	Representative: Goode, Ian Roy
	London Patent OperationGeneral Electric International, Inc.Essex House12-13 Essex Street London WC2R 3AA London WC2R 3AA (GB)

(54)	ELECTRON BEAM PHYSICAL VAPOR DEPOSITION APPARATUS AND VIEWPORT THEREFOR