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(11) | EP 1 199 475 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Vacuum pump |
(57) Passage structure for a vacuum pump has a flange, a muffler, a valve hole forming
body, a guide pipe and an exhaust pipe. The flange is coupled to the muffler. The
muffler is detachably fitted into the valve hole forming body. The valve hole forming
body is detachably fitted into the guide pipe. The exhaust pipe is coupled to the
guide pipe via the valve hole forming body. Each flange of the muffler, the valve
hole forming body and the guide pipe is screw-on all together. A backflow preventing
means is constituted of the guide pipe, the valve hole forming body, a valve body
and a return spring. The guide pipe accommodates the valve body and the return spring
therein. The valve body opens and closes a valve hole formed at the valve hole forming
body. A separation preventing means is engaged with an inner circumferential surface
of the guide pipe. |