(19)
(11) EP 1 200 843 A1

(12)

(43) Date of publication:
02.05.2002 Bulletin 2002/18

(21) Application number: 00952386.1

(22) Date of filing: 28.07.2000
(51) International Patent Classification (IPC)7G01R 1/073, G01R 3/00
(86) International application number:
PCT/US0021/012
(87) International publication number:
WO 0109/623 (08.02.2001 Gazette 2001/06)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 28.07.1999 US 146241 P

(71) Applicant: Nanonexus, Inc.
Fremont, CA 94539 (US)

(72) Inventors:
  • MOK, Sammy
    Cupertino, CA 95014 (US)
  • CHONG, Fu, Chiung
    Saratoga, CA 95070 (US)

(74) Representative: Leeming, John Gerard 
J.A. Kemp & Co.,14 South Square,Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)

   


(54) CONSTRUCTION STRUCTURES AND MANUFACTURING PROCESSES FOR INTEGRATED CIRCUIT WAFER PROBE CARD ASSEMBLIES