(19)

(11)

EP 1 200 983 A2

(12)

(88) Date of publication A3: 07.03.2002 (43) Date of publication: 02.05.2002 Bulletin 2002/18 (21) Application number: 00916992.1 (22) Date of filing: 17.03.2000

(51) International Patent Classification (IPC)7: H01J 41/20 (86) International application number: PCT/EP0002/550 (87) International publication number: WO 0057/452 (28.09.2000 Gazette 2000/39)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 19.03.1999 US 125317 P (71) Applicant: FEI COMPANY Hillsboro, OR 97124-5830 (US)	(72) Inventors: MCGINN, James, B. NL-5656 AA Eindhoven (NL) SPAGNOL, Miriam NL-5656 AA Eindhoven (NL) (74) Representative: Bakker, Hendrik  INTERNATIONAAL OCTROOIBUREAU B.V.,Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)