(19)
(11) EP 1 203 265 A1

(12)

(43) Date of publication:
08.05.2002 Bulletin 2002/19

(21) Application number: 00961318.3

(22) Date of filing: 19.05.2000
(51) International Patent Classification (IPC)7G03F 7/20, G03F 9/00
(86) International application number:
PCT/US0013/931
(87) International publication number:
WO 0075/730 (14.12.2000 Gazette 2000/50)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 20.05.1999 US 135316 P
10.09.1999 US 393200
10.09.1999 US 393451

(71) Applicant: California Institute of Technology
Pasadena, CA 91125 (US)

(72) Inventors:
  • Williams, Colin
    Half Moom Bay, CA 94019 (US)
  • Dowling, Jonathan
    Los Angeles, CA 90042 (US)
  • Della Rosa, Giovanni
    Santa Monica, CA 90405 (US)

(74) Representative: De Gregori, Antonella et al
Ing. Barzano & Zanardo Milano S.p.A.Via Borgonuovo 10
20121 Milano
20121 Milano (IT)

   


(54) LITHOGRAPHY USING QUANTUM ENTANGLED PARTICLES