(19)

(11)

EP 1 203 400 A1

(12)

(43) Date of publication: 08.05.2002 Bulletin 2002/19 (21) Application number: 00948639.0 (22) Date of filing: 13.07.2000

(51) International Patent Classification (IPC)7: H01L 21/02, H01L 23/532, H01L 27/06, H01L 21/768, H01C 7/00, H01C 17/075 (86) International application number: PCT/US0019/010 (87) International publication number: WO 0106/547 (25.01.2001 Gazette 2001/04)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 14.07.1999 US 143691 P (71) Applicant: LUCENT TECHNOLOGIES INC. Murray Hill, New Jersey 07974-0636 (US)	(72) Inventors: HUTTEMANN, Robert, D. Macungie, PA 18062 (US) TEREFENKO, George, J. Mohnton, PA 19540 (US) (74) Representative: Williams, David John et al Page White & Farrer,54 Doughty Street London WC1N 2LS London WC1N 2LS (GB)