| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
| (30) |
Priority: |
16.08.1999 US 149215 P
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95054 (US) |
|
| (72) |
Inventors: |
|
- ALMOGY, Gilad
53257 Givataim (IL)
- MAZAKI, Hadar
53257 Rehovot (IL)
- PHILLIP, Zvi, Howard
73142 Shoham (IL)
- REINHORN, Silviu
90805 Mevaseret-Zion (IL)
- GOLBERG, Boris
77452 Ashdod (IL)
- SOME, Daniel, I.
76705 Rehovot (IL)
|
| (74) |
Representative: Bayliss, Geoffrey Cyril et al |
|
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB) |
|