(19)
(11) EP 1 204 860 A1

(12)

(43) Date of publication:
15.05.2002 Bulletin 2002/20

(21) Application number: 00957477.3

(22) Date of filing: 16.08.2000
(51) International Patent Classification (IPC)7G01N 21/95, G02B 21/08
(86) International application number:
PCT/US0022/410
(87) International publication number:
WO 0113/098 (22.02.2001 Gazette 2001/08)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 16.08.1999 US 149215 P

(71) Applicant: Applied Materials, Inc.
Santa Clara,California 95054 (US)

(72) Inventors:
  • ALMOGY, Gilad
    53257 Givataim (IL)
  • MAZAKI, Hadar
    53257 Rehovot (IL)
  • PHILLIP, Zvi, Howard
    73142 Shoham (IL)
  • REINHORN, Silviu
    90805 Mevaseret-Zion (IL)
  • GOLBERG, Boris
    77452 Ashdod (IL)
  • SOME, Daniel, I.
    76705 Rehovot (IL)

(74) Representative: Bayliss, Geoffrey Cyril et al
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) VARIABLE ANGLE ILLUMINATION WAFER INSPECTION SYSTEM