SYSTEM AND METHOD FOR PROVIDING IMPLANT DOSE UNIFORMITY ACROSS THE SURFACE OF A SUBSTRATE - Patent 1204986

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EP 1 204 986 A1

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(43)	Date of publication:
	15.05.2002 Bulletin 2002/20

(21)	Application number: 00949793.4

(22)	Date of filing: 03.08.2000

(51)	International Patent Classification (IPC)⁷: H01J 37/32

(86)	International application number:
	PCT/GB0003/003

(87)	International publication number:
	WO 0111/659 (15.02.2001 Gazette 2001/07)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

06.08.1999 US 369528

(71)	Applicant: Axcelis Technologies, Inc.
	Beverly, MA 01915 (US)

(72)	Inventors:
	KELLERMAN, Peter, Lawrence Essex, MA 01929 (US) STEJIC, George Franklin, WI 53132 (US)

(74)	Representative: Burke, Steven David et al
	R.G.C. Jenkins & Co.26 Caxton Street London SW1H 0RH London SW1H 0RH (GB)

(54)	SYSTEM AND METHOD FOR PROVIDING IMPLANT DOSE UNIFORMITY ACROSS THE SURFACE OF A SUBSTRATE