(19)
(11) EP 1 206 326 A1

(12)

(43) Date of publication:
22.05.2002 Bulletin 2002/21

(21) Application number: 00960116.2

(22) Date of filing: 29.06.2000
(51) International Patent Classification (IPC)7B08B 7/00, B08B 7/04, B08B 3/00, B08B 3/04, B08B 3/08, B08B 3/10, B08B 3/12, B08B 5/00
(86) International application number:
PCT/US0040/285
(87) International publication number:
WO 0100/338 (04.01.2001 Gazette 2001/01)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 29.06.1999 US 342685

(71) Applicant: L-Tech Corporation
Mountain View, CA 94043 (US)

(72) Inventor:
  • Ferrel, Gary W.
    Half Moon Bay, CA 94019 (US)

(74) Representative: Hallam, Arnold Vincent 
LEWIS & TAYLOR5 The Quadrant
Coventry, CV1 2EL
Coventry, CV1 2EL (GB)

   


(54) CHEMICAL FILM CLEANING AND DRYING