(19)
(11)
EP 1 206 326 A1
(12)
(43)
Date of publication:
22.05.2002
Bulletin 2002/21
(21)
Application number:
00960116.2
(22)
Date of filing:
29.06.2000
(51)
International Patent Classification (IPC)
7
:
B08B
7/00
,
B08B
7/04
,
B08B
3/00
,
B08B
3/04
,
B08B
3/08
,
B08B
3/10
,
B08B
3/12
,
B08B
5/00
(86)
International application number:
PCT/US0040/285
(87)
International publication number:
WO 0100/338
(
04.01.2001
Gazette 2001/01)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI
(30)
Priority:
29.06.1999
US 342685
(71)
Applicant:
L-Tech Corporation
Mountain View, CA 94043 (US)
(72)
Inventor:
Ferrel, Gary W.
Half Moon Bay, CA 94019 (US)
(74)
Representative:
Hallam, Arnold Vincent
LEWIS & TAYLOR5 The Quadrant
Coventry, CV1 2EL
Coventry, CV1 2EL (GB)
(54)
CHEMICAL FILM CLEANING AND DRYING