(19)
(11) EP 1 208 587 A1

(12)

(43) Date of publication:
29.05.2002 Bulletin 2002/22

(21) Application number: 00955691.1

(22) Date of filing: 17.08.2000
(51) International Patent Classification (IPC)7: H01L 21/00
(86) International application number:
PCT/US0022/677
(87) International publication number:
WO 0113/410 (22.02.2001 Gazette 2001/08)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 18.08.1999 US 376505
18.08.1999 US 376799
18.08.1999 US 377028
18.08.1999 US 376506

(71) Applicant: IBIS TECHNOLOGY CORPORATION
Danvers, MA 01923 (US)

(72) Inventors:
  • BLAKE, Julian, G.
    Beverley Farms, MA 01915 (US)
  • SMICK, Theodore, H.
    Essex, MA 01929 (US)
  • ANDREWS, Robert, S.
    Kensington, NH 03827 (US)
  • CORDTS, Bernhard, F., III
    Ipswich, MA 01938 (US)
  • RYDING, Geoffrey
    Manchester, MA 01944 (US)

(74) Representative: Strehl Schübel-Hopf & Partner 
Maximilianstrasse 54
80538 München
80538 München (DE)

   


(54) WAFER HOLDER ASSEMBLY