(19)
(11) EP 1 208 595 A2

(12)

(88) Date of publication A3:
15.11.2001

(43) Date of publication:
29.05.2002 Bulletin 2002/22

(21) Application number: 00950811.0

(22) Date of filing: 28.07.2000
(51) International Patent Classification (IPC)7H01L 23/48, G01R 1/073, H01L 21/48
(86) International application number:
PCT/US0020/530
(87) International publication number:
WO 0109/952 (08.02.2001 Gazette 2001/06)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 30.07.1999 US 364855
30.07.1999 US 364788

(71) Applicant: FORMFACTOR, INC.
Livermore, CA 94550 (US)

(72) Inventors:
  • ELDRIDGE, Benjamin, N.
    Danville, CA 94523 (US)
  • MATHIEU, Gaetan
    Livermore, CA 94550 (US)

(74) Representative: Käck, Jürgen 
Kahler, Käck, Fiener et Col.Vorderer Anger 268
86899 Landsberg
86899 Landsberg (DE)

   


(54) INTERCONNECT ASSEMBLIES AND METHODS