(19)

(11)

EP 1 208 607 A1

(12)

(43) Date of publication: 29.05.2002 Bulletin 2002/22 (21) Application number: 00957262.9 (22) Date of filing: 16.08.2000

(51) International Patent Classification (IPC)7: H01L 31/0328 (86) International application number: PCT/US0020/780 (87) International publication number: WO 0113/436 (22.02.2001 Gazette 2001/08)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 16.08.1999 US 148702 P (71) Applicant: CORNELL RESEARCH FOUNDATION, INC. Ithaca, NY 14850 (US)	(72) Inventors: SHEALY, James, R. Ithaca, NY 14850 (US) GREEN, Bruce, M. Ithaca, NY 14850 (US) EASTMAN, Lester, F. Ithaca, NY 14850 (US) (74) Representative: W.P. THOMPSON & CO.  Eastcheap HouseCentral Approach Letchworth,Hertfordshire SG6 3DS Letchworth,Hertfordshire SG6 3DS (GB)