PROCESS AND APPARATUS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER - Patent 1212151

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EP 1 212 151 A1

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(43)	Date of publication:
	12.06.2002 Bulletin 2002/24

(21)	Application number: 00948892.5

(22)	Date of filing: 21.07.2000

(51)	International Patent Classification (IPC)⁷: B08B 3/08, B08B 3/10, B08B 5/00, B08B 9/20, B08B 9/34, C23G 1/00, C23G 1/02

(86)	International application number:
	PCT/US0020/036

(87)	International publication number:
	WO 0107/177 (01.02.2001 Gazette 2001/05)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

23.07.1999 US 145350 P

(71)	Applicant: SEMITOOL, INC.
	Kalispell,Montana 59901 (US)

(72)	Inventor:
	BERGMAN, Eric, J. Kalispell, MT 59901 (US)

(74)	Representative: Viering, Jentschura & Partner
	Postfach 22 14 43 80504 München 80504 München (DE)

(54)	PROCESS AND APPARATUS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER