(19)

(11)

EP 1 214 485 A1

(12)

(43) Date of publication: 19.06.2002 Bulletin 2002/25 (21) Application number: 00953860.4 (22) Date of filing: 07.08.2000

(51) International Patent Classification (IPC)7: E04F 15/024 (86) International application number: PCT/US0021/490 (87) International publication number: WO 0118/323 (15.03.2001 Gazette 2001/11)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 07.09.1999 US 391113 (71) Applicant: SpeedFam-IPEC Inc. Chandler, AZ 85226 (US)	(72) Inventors: RAPISARDA, Joseph Chandler, AZ 85224 (US) COLLEY, Timothy Tempe, AZ 85284 (US) (74) Representative: Findlay, Alice Rosemary et al Lloyd Wise, Tregear & Co.,Commonwealth House,1-19 New Oxford Street London WC1A 1LW London WC1A 1LW (GB)