Linear motor and exposure apparatus using the same

(19)

(11)

EP 1 215 805 A8

(12)	CORRECTED EUROPEAN PATENT APPLICATION

(48)	Corrigendum issued on:
	02.10.2002 Bulletin 2002/40

(43)	Date of publication:
	19.06.2002 Bulletin 2002/25

(21)	Application number: 01310261.1

(22)	Date of filing: 07.12.2001

(51)	International Patent Classification (IPC)⁷: H02K 41/03, H02K 3/47

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

08.12.2000 JP 2000374939

(71)	Applicant: CANON KABUSHIKI KAISHA
	Tokyo (JP)

(72)	Inventors:
	Emoto, Keiji Ohta-ku, Tokyo (JP) Outuka, Kazuhito Ohta-ku, Tokyo (JP) Miyajima, Yoshikazu Ohta-ku, Tokyo (JP)

(74)	Representative: Beresford, Keith Denis Lewis et al
	BERESFORD & Co. 2-5 Warwick Court, High Holborn London WC1R 5DH London WC1R 5DH (GB)

(54)	Linear motor and exposure apparatus using the same

(57) Some of linear motors which constitute an exposure apparatus have coils (16) each obtained by winding a copper foil wire (53) as a foil-like conductor having an insulating layer around a core member (51) in a multilayered structure. The coil (16) is fixed to a positioning portion (54) serving as the coil fixing portion of the linear motor by using the core member (51). The core member (51) is formed from the same insulating material with low thermal conductivity as that of the positioning portion (54) of a linear motor housing (55) or a material with almost the same linear expansion coefficient.