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(11) | EP 1 215 805 A8 |
(12) | CORRECTED EUROPEAN PATENT APPLICATION |
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(54) | Linear motor and exposure apparatus using the same |
(57) Some of linear motors which constitute an exposure apparatus have coils (16) each
obtained by winding a copper foil wire (53) as a foil-like conductor having an insulating
layer around a core member (51) in a multilayered structure. The coil (16) is fixed
to a positioning portion (54) serving as the coil fixing portion of the linear motor
by using the core member (51). The core member (51) is formed from the same insulating
material with low thermal conductivity as that of the positioning portion (54) of
a linear motor housing (55) or a material with almost the same linear expansion coefficient. |