(19)
(11) EP 1 216 487 A1

(12)

(43) Date of publication:
26.06.2002 Bulletin 2002/26

(21) Application number: 00961925.5

(22) Date of filing: 15.09.2000
(51) International Patent Classification (IPC)7H01L 23/04, H01L 23/10, H01L 21/56, H01L 23/29, H01L 21/52, H01L 21/54
(86) International application number:
PCT/US0025/315
(87) International publication number:
WO 0120/671 (22.03.2001 Gazette 2001/12)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 17.09.1999 US 154400 P

(71) Applicant: MOTOROLA, INC.
Schaumburg, IL 60196 (US)

(72) Inventors:
  • XU, DaXue
    North Plainfield, NJ 07060 (US)
  • HUGHES, Henry, G.
    Scottsdale, AZ 85254 (US)
  • BERGSTROM, Paul
    Chandler, AZ 85248 (US)
  • SHEMANSKY, Frank, A., Jr.
    New Hope, PA 18938 (US)
  • TSOI, Hak-Yam
    Scottsdale, AZ 85259 (US)

(74) Representative: Potts, Susan Patricia et al
Motorola European Intellectual Property OperationsMidpointAlencon Link
Basingstoke, Hampshire RG21 7PL
Basingstoke, Hampshire RG21 7PL (GB)

   


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