FORCE SENSING DEVICES WITH MULTIPLE FILLED AND/OR EMPTY CHANNELS AND OTHER ATTRIBUTES - Patent 1218947

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EP 1 218 947 A2

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(88)	Date of publication A3:
	22.11.2001

(43)	Date of publication:
	03.07.2002 Bulletin 2002/27

(21)	Application number: 00991370.8

(22)	Date of filing: 21.09.2000

(51)	International Patent Classification (IPC)⁷: H01L 35/34, H01L 35/28

(86)	International application number:
	PCT/US0021/978

(87)	International publication number:
	WO 0127/581 (19.04.2001 Gazette 2001/16)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

23.09.1999 IL 13202199

(71)	Applicant: Nanoptics, Inc.
	Jerusalem 93707 (IL)

(72)	Inventors:
	LEWIS, Aaron Jerusalem 91904 (IL) FISH, Galina 90916 Jerusalem (IL) DEKHTER, Rima, Glazer 96510 Jerusalem (IL) KOKOTOV, Sophia 98536 Maale Adumim (IL)

(74)	Representative: Fuhlendorf, Jörn, Dipl.-Ing. et al
	PatentanwälteDreiss, Fuhlendorf, Steimle & Becker,Postfach 10 37 62 70032 Stuttgart 70032 Stuttgart (DE)

(54)	FORCE SENSING DEVICES WITH MULTIPLE FILLED AND/OR EMPTY CHANNELS AND OTHER ATTRIBUTES