(19)
(11) EP 1 225 972 A2

(12)

(88) Date of publication A3:
04.10.2001

(43) Date of publication:
31.07.2002 Bulletin 2002/31

(21) Application number: 00975648.7

(22) Date of filing: 25.09.2000
(51) International Patent Classification (IPC)7: B01F 5/10, B01F 3/04, C02F 3/12
(86) International application number:
PCT/US0040/985
(87) International publication number:
WO 0121/294 (29.03.2001 Gazette 2001/13)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 24.09.1999 US 155959 P

(71) Applicant: SEMITOOL, INC.
Kalispell,Montana 59901 (US)

(72) Inventors:
  • RITZDORF, Thomas, L.
    Bigfork, MT 59911 (US)
  • FULTON, Dakin, J.
    Whitefish, MO 59937 (US)
  • CHEN, Linlin
    Plano, TX 75025 (US)

(74) Representative: Hitchcock, Esmond Antony 
Lloyd Wise, Tregear & Co.,Commonwealth House,1-19 New Oxford Street
London WC1A 1LW
London WC1A 1LW (GB)

   


(54) PATTERN DEPENDENT SURFACE PROFILE EVOLUTION OF ELECTROCHEMICALLY DEPOSITED METAL