FORMING MEMBERS FOR SHAPING A REACTIVE METAL AND METHODS FOR THEIR FABRICATION

Description

Field of the Invention

[0001] This invention relates to protective coatings for forming members such as molds, dies and the like for shaping aluminum and other reactive metals. More particularly, the invention relates to forming members having a coating thereupon of doped chromium nitride and to methods for their fabrication and use.

Background of the Invention

[0002] Molds, dies, cores, pins and other such forming members for shaping molten metals are frequently manufactured from steel because of its low cost and ease of fabrication. Problems arise when such forming members are used to shape reactive metals, such as aluminum, magnesium and zinc containing alloys. It has been found that such alloys, particularly low iron content aluminum alloys, are reactive in the molten state and can corrode and/or erode the surface of molds, dies and other forming members significantly reducing their surface life.

[0003] A number of approaches have been taken in an attempt to solve this problem. One approach involves nitriding the surface of the forming member. Nitrided surfaces do provide some protection from attack by certain alloys; but this protection is fairly limited, and nitrided surfaces are ineffective against more reactive metals, such as aluminum alloys, particularly those aluminum alloys having an iron content of 1.2% or less, and aluminum alloys with a silicon content of up to 18%. Another approach involves implanting tungsten into the surface of steel forming members. Generally, such implantation processes are fairly expensive; furthermore, protection provided thereby is still somewhat limited.

[0004] A further approach, which is disclosed in U.S. Patent 5,476,134, comprises coating a surface of the forming member with a layer of chromium nitride. As disclosed therein, the chromium nitride coating has good resistance to attack by reactive metal alloys, including low iron content aluminum alloys. While such prior art chromium nitride coatings provide good erosion resistance, it has been found that these coatings tend to fail, particularly in the region of sharp features on the forming member such as edges, textured surfaces and the like. While not wishing to be bound by speculation, the inventors herein theorize that stresses in such prior art coatings concentrate at sharp edges and provide cracks and fissures which allow molten metal to contact underlying substrate material and cause erosion.

[0005] Cunha, L. et al. in" Microstructure of GN coating produced by PVD techniques.", Thin Solid Films V 355, 1999, discloses chromium nitride coatings on steel in which the presence of less than 2% oxygen has been detected in the bulk of the coating using XPS.

[0006] The foregoing makes clear that there is a need for a surface treatment which can be applied to forming members such as molds and dies, which will protect such members from attack by reactive metals. The treatment should be easy to apply, low in cost, and should not interfere with use of the forming members. In addition, the treatment should be durable and provide long service life. The present invention, as will be described in detail hereinbelow, utilizes a doped coating of chromium nitride as a protective treatment for forming members. While chromium nitride coatings have previously been used in molds for shaping aluminum, doped coatings have not; and it has been found, unexpectedly, that the addition of relatively small amounts of dopant greatly enhance the resistance of chromium nitride coatings to attack by molten metal. These and other advantages of the present invention will be apparent from the drawings, discussion and description which follow.

Brief Description of the Invention

[0007] The invention is given in the appended claims.

[0008] There is disclosed herein a forming member for shaping a reactive metal. The forming member comprises a substrate having a forming surface defined thereupon, and a protective coating on at least a portion of the forming surface. The protective coating comprises doped chromium nitride. The chromium nitride is in the form of a polycrystalline CrN matrix having a dopant dispersed therein, and the CrN crystals have a slightly preferred bias in the 220 orientation. The dopant ranges comprise 1-10 atomic percent, and specifically comprise transition metals, such as tungsten or molybdenum, as well as oxygen. Coating thicknesses are preferrably in the range of 2-40 microns.

[0009] Also disclosed herein is a method for forming the protective coating, which method comprises depositing the coating by a physical vapor deposition process. In some specific embodiments of the process, the physical vapor deposition process is a cathodic arc process. In some versions of the cathodic arc process, the dopant is a metal, and is incorporated into a chromium cathode, and the deposition process is carried out in a working atmosphere of nitrogen so as to deposit the doped chromium nitride coating. In other versions of the cathodic process, the dopant is oxygen, and the cathode consists essentially of chromium. The working atmosphere in such instance comprises nitrogen and oxygen, and operates to deposit an oxide doped chromium nitride coating. Also disclosed herein are methods for using the coated forming members in a metal forming process.

Brief Description of the Drawing

[0010] 

Figure 1 is a graph illustrating the effect of the coatings of the present invention in preventing corrosion of steel by molten aluminum.

Detailed Description of the Invention

[0011] In accord with the present invention, it has been found that doped chromium nitride provides a protective coating which can be applied to molds and other such metal forming materials, and which is highly resistant to attack by molten reactive metals such as low iron content aluminum alloys. The doped coatings of the present invention provide metal forming members with superior resistance to corrosion and/or erosion by molten metals, as compared to prior art coatings.

[0012] The materials of the present invention differ physically, and in performance characteristics, from prior art undoped chromium nitride coatings. While not wishing to be bound by speculation, the inventors hereof postulate that the presence of the dopant material minimizes compressive stress in chromium nitride films thereby making them less prone to cracking, particularly in the regions of edges or sharp features. In addition, the dopant is believed to reduce the porosity of the films and to stop propagation of cracks therethrough. X-ray diffraction analysis indicates that the coatings of the present invention are primarily in the form of a matrix of polycrystalline CrN having the dopant material dispersed therethrough. X-ray diffraction further indicates that the presence of the dopant produces a finer grain structure in the polycrystalline matrix as compared to the undoped material. This finer matrix provides for tighter packing and produces a coating which is dense and nonporous, and hence less likely to be penetrated by molten metal. The dopant also appears to influence the crystal orientation of the material. Undoped polycrystalline chromium nitride is found to have a preferred bias to the 220 orientation, while doped chromium nitride films of the present invention have a more random orientation, with only a slightly preferred bias (i.e. less than 10%) to the 220 orientation. This change in structure is also postulated to increase the strength and corrosion resistance of the films.

[0013] According to the invention dopant is present in an amount of 1-10 atomic percent of the material, and in some specifically preferred embodiments, the dopant comprises 2-5 atomic percent of the material. The dopant materials consist of transition metals and oxygen taken either singly or in combination. Some specifically preferred transition metals comprise tungsten and molybdenum. The thickness of the coating used will depend upon particular applications; however, in most instances, it has been found that coating in the thickness range of 2-10 microns will provide a steel substrate with very good resistance to attack by molten reactive metals. Furthermore, coatings of such thickness exhibit very long service life. However, coatings of 20-30 microns will be practical and desirable for some applications, while still greater thicknesses of 1 - 40 microns may be implemented in accord with the present invention.

[0014] The coatings of the present invention are deposited by a physical vapor deposition process. A particularly preferred group of deposition processes comprises cathodic arc physical vapor deposition. Such processes are known in the art and have been widely used for depositing hard, thin film coatings onto a variety of substrates. Cathodic arc processes employ an arc to vaporize and ionize metal from one or more solid cathode sources. The ionized metal vapor is attracted to the substrate work pieces which are maintained at a negative bias. Advantages of the process are high deposition rates together with relatively low substrate temperatures. The process is typically carried out at relatively low pressures, and in some instances, an atmosphere which includes a reactive working gas is present in the deposition chamber. The working gas reacts with the metallic species to produce the coating material. One such process, as adapted for deposition of undoped chromium nitride, is disclosed on pages 833, and following, of the June, 1995 issue of a publication entitled The Fabricator published by the Fabricators and Manufacturers Association International; 833 Featherstone Road, Rockford, Illinois 61107-6302; the disclosure of which is incorporated herein by reference.

[0015] In accord with the present invention, the dopant material can be incorporated directly into a cathode. For example, a cathode may be made of a mixture of chromium and a dopant; or a system may include a plurality of cathodes, some of which are comprised of the dopant, and others of which are comprised of undoped chromium. Alternatively, the dopant may be present in the working gas. In those instances where the dopant comprises a metal such as tungsten or molybdenum, the dopant is most preferably incorporated directly into the chromium cathode material. The reactive gas comprises nitrogen, and the process deposits metal-doped chromium nitride. In those instances where the dopant comprises oxygen, the cathode is most preferably pure chromium, and the working gas includes nitrogen and oxygen, most preferably in a ratio of 2:1. Pressure of the working gas is typically in the range of 20-25 millitorr, and the work piece is biased by voltage in the range of approximately 50-75 volts. However, other parameters may also be advantageously employed depending on the specifics of the deposition apparatus and process. While a physical vapor deposition process is described wherein the chromium and dopant are simultaneously deposited, deposition may also be sequential. For example, chromium may first be deposited in a thin layer then the dopant (either metal or oxygen) deposited thereatop. This process may be repeated for a number of cycles so as to build up a body of doped material. Also, it is to be understood that other processes for the deposition of the coating such as sputtering and the like may also be employed.

[0016] A series of experiments were carried out to evaluate the materials of the present invention. In this experimental series, a number of sample coatings were prepared and evaluated. The coatings comprised doped chromium nitride materials as well as comparative materials of the prior art. The coatings were applied onto cylindrical steel pins by a cathodic arc deposition process of the type described hereinabove. The coated pins were immersed into molten aluminum for time periods ranging from one to three hours. The pins were rotated while immersed. The pins were removed from the molten aluminum, allowed to cool, and any adherent aluminum removed by etching in a caustic solution. The weight loss per unit area (exposed) of the pins was then measured to assess the protective effect of the various coatings. These experimental conditions provide a good simulation of conditions encountered in casting operations. Process parameters employed for the preparation of the coatings were varied in order to optimize coating conditions. The most preferred coatings were then evaluated in an actual casting operation.

Experimental Results

[0017] The first group of coatings which were evaluated comprised chromium nitride doped with tungsten. Samples were prepared by a cathodic arc plasma deposition process utilizing cathodes having 5 and 10 atomic percent of tungsten in chromium. The depositions were carried out utilizing a bias voltage ranging from 50 to 250 volts and a nitrogen pressure in the chamber ranging from 5 to 25 millitorr. The samples were then evaluated as described above. Based upon the foregoing, it was determined that the best materials were prepared utilizing a cathode comprising 5 atomic percent tungsten in chromium. The optimum range for bias voltage was 50-75 volts and the optimum range for nitrogen pressure was 20-25 millitorr. The following conditions produced coatings comprised of a CrN matrix having approximately 2-4 atomic percent of tungsten dispersed therein. X-ray analysis showed the material to be mostly random in its orientation, with only a slight bias to the 220 orientation. In a coating deposited onto a flat coupon, the thickness was measured, by the ball-crater method, as being approximately 5.5 microns. This particular coated sample had a surface roughness Ra of 1009±184, Å (2 mm scan); a microhardness Hv_5gr of 3599±63 and a modulus of elasticity of 342±6 Gpa. A second sample was coated onto a cylindrical pin. This coating had a measured thickness, by ball-crater method, of 5.8 microns at the flat tip of the pin and 6.2 microns as measured one inch from the tip. Surface roughness of this material was measured at 964±183 at the point one inch from the tip. The microhardness of the material as measured at the tip was 3237±63 Hv_5gr; and the modulus of elasticity at the flat tip was 335±6 GP_a.

[0018] Process parameters for the preparation of oxygen doped chromium nitride films were also evaluated. In this experimental series, bias voltage was also varied from 50 to 250 volts and pressure of the working gas from 5 to 25 millitorr. The O/N ratio varied from 0.125 to 0.5. Samples were evaluated as described above, and it was determined that the optimum range of bias voltage for a preparation of coatings of this type is 50-75 volts, the optimum pressure for the working gas 20-25 millitorr, and the optimum ratio of oxygen to nitrogen is 1:2. As for the preceding series of materials, coatings were deposited onto steel coupons as well as cylindrical pins. The thickness of the coupon coating as measured by the ball-crater method was 5.2 microns. The surface roughness, Ra of the thus prepared material (2 mm scan) was measured at 756±171 Å. The microhardness of this particular coatings was 2940±58 Hv₅ gr, and its modulus of elasticity 308±6 GPa. In the coated pin, the thickness at the flat tip of the pin was measured at 5.2 microns, and the thickness 1 inch from the tip at 5.0 microns. Surface roughness was measured at 1 inch from the tip and was 1256±72 Å (2 mm scan). Microhardness as measured at the flat tip of the pin was 2849±45 Hv₅ gr, and the modulus of elasticity as measured at the flat tip of the pin was 313±5 GPa.

[0019] Referring now to Figure 1, there is shown a graph depicting the test results for a series of materials both in accord with the present invention, and illustrative of prior art. Specifically, Figure 1 shows the log of weight loss plotted for a series of different materials after 2 and 3 hours of immersion in molten aluminum. The tests were carried out using molten aluminum alloy A380. This alloy is employed in approximately 90% of commercial casting operations. The aluminum was maintained at a temperature of 760°C. Pins were coated with various of the materials to a thickness of approximately 4-6 microns. Each pin was rotated in the molten aluminum at approximately 100 rpm, which at the diameter of the particular pins employed resulted in a relative linear motion of 2.5 inches per second for the coated surface in relation to the molten aluminum. Each pin was maintained in the molten aluminum for 1 or 3 hours, after which residual aluminum was etched away in a caustic bath, and weight loss of the pins determined. As will be seen from Figure 1, some of the three hour tests were run in duplicate.

[0020] Referring now to Figure 1, first entry labeled H-13 represents an uncoated steel pin. As will be seen, weight loss is very high. The second sample labeled CrN comprises a chromium nitride coating of the type employed in the prior art. This coating does provide some protection from erosion. The next three coatings are labeled CrON-1, CrON-2 and CrON-3 respectively. These coatings all comprise oxygen doped chromium nitride materials of the present invention. As will be seen, the materials provide superior resistance to corrosion and erosion. The next coating is labeled AlCrN and comprises an aluminum doped chromium nitride coating of the present invention. Again, it will be noted that good erosion protection is provided. The next coating is labeled CrMoN and this material comprises a molybdenum doped chromium nitride in accord with the present invention. This material also provides very good erosion protection. The final coating is labeled CrW5N and comprises a tungsten doped coating in accord with the present invention. Again, this material provides very good corrosion protection. From the data of Figure 1, it will be seen that the doped chromium nitride materials of the present invention are very effective in preventing erosion of steel by molten aluminum, as compared to prior art coatings.

[0021] Various materials of the present invention were evaluated in actual production conditions. In one experimental series, aluminum die casting molds were coated with tungsten doped materials of the present invention, and results compared with tooling coated with prior art coatings of undoped chromium nitride, CrC and VC. The CrN coating provided 25,000 casting cycles before failure. The CrC coating produced approximately 17,000 cycles before failure. The coatings of the present invention were evaluated after 42,000 casting cycles (or shots) and found to be in very good condition. Based upon visual observation, operators of the casting operation predicted an approximately 50-75,000 cycles of casting could be carried out before failure of the coating. In another evaluation, performance of the tungsten doped coatings of the present invention were compared with nitrided mold coatings. The nitrided coatings failed after approximately 16,000 molding cycles, while the materials of the present invention continued to perform well even after 20,700 molding cycles.

[0022] The coatings of the present invention were also subjected to thermal cycling in order to assess if catastrophic failure would result. These coatings were heated to a temperature of approximately 750°C in molten aluminum, and then quenched in water. The coatings were inspected after 3,000 of said cycles, and no soldering of aluminum to the underlying steel was noted, nor was any initiating of hairline cracks noted, both of which were present in prior art CrN coatings.

[0023] As is demonstrated by the foregoing, the present invention provides a novel protective coating of doped chromium nitride. This coating is fundamentally different from prior art undoped chromium nitride coatings as is made clear by analytical data as well as performance evaluations.

Claims

1. Protective coating resistant to molten reactive metals, essentially consisting of a matrix of CrN having a thickness of 1-40 µm and having dispersed therein in an amount of 1-10 atomic-% a dopant selected from transition metals, oxygen, and combinations thereof.

2. Coating of claim 1, which is polycrystalline with a random crystal orientation having a bias to the 220 crystal orientation of less than 10 %.

3. Coating of claim 1 or 2, wherein the dopant is selected from tungsten, molybdenum, oxygen, and combinations thereof.

4. Coating of any of claims 1-3, having a thickness of 1-20 µm.

5. Forming member for shaping a reactive metal, comprising:

i) a substrate having a forming surface defined thereupon; and

ii) disposed on at least a portion of the forming surface, a protective coating as defined in any of claims 1-4.

6. Forming member of claim 5, wherein the substrate is comprised of steel.

7. Forming member of claim 5 or 6, wherein said forming member comprises a die casting mold.

8. Forming member of claim 5 or 6, which is a die casting die.

9. Use of a forming member as defined in any of claims 5-8 for forming a reactive metal by maintaining a reactive metal in contact with the forming surface of the forming member for a period of time sufficient to form the reactive metal.

10. Use of claim 9, wherein the reactive metal comprises aluminium or zinc or magnesium.

11. Method for forming a protective coating on a forming member, comprising depositing a coating of doped chromium nitride as defined in any of claims 1-4 onto at least a portion of the forming surface of a substrate having a forming surface defined thereupon by a physical vapor deposition (PVD) process.

12. Method of claim 11, wherein the deposition process is a cathodic arc PVD process.

13. Method of claim 12, wherein the chromium nitride is doped with at least one transition metal, and the PVD process is carried out using a source comprising chromium and the dopant metal, and a working atmosphere comprising nitrogen.

14. Method of claim 13, wherein the dopant comprises tungsten and wherein the cathodic arc PVD process is carried out at a bias of 50-75 V and a pressure of the working atmosphere of 20-25 mtorr.

15. Method of claim 12, wherein the chromium nitride is doped with oxygen, and wherein said PVD process employs a cathode essentially consisting of chromium and a working atmosphere comprising nitrogen and oxygen.

16. Method of claim 15, wherein said PVD process is carried out at a bias of 50-75 V and with a working gas comprising nitrogen and oxygen in a molar ratio of 2:1 oxygen at a pressure of 20-25 mtorr.

Ansprüche

1. Gegenüber geschmolzenen reaktiven Metallen resistente Schutzbeschichtung, die im wesentlichen aus einer Matrix aus CrN mit einer Dicke von 1 bis 40 µm besteht und darin dispergiert ein Dotiermittel, ausgewählt aus Übergangsmetallen, Sauerstoff und Kombinationen davon, in einer Menge von 1-10 Atom-% aufweist.

2. Beschichtung gemäss Anspruch 1, die polykristallin ist, mit einer Zufallskristallausrichtung mit einer Neigung zur 220-Kristallausrichtung von weniger als 10 %.

3. Beschichtung gemäss Anspruch 1 oder 2, worin das Dotiermittel ausgewählt ist aus Wolfram, Molybdän, Sauerstoff und Kombinationen davon.

4. Beschichtung gemäss mindestens einem der Ansprüche 1 bis 3, die eine Dicke von 1-20 µm aufweist.

5. Formgebungsbauteil zur Formgebung eines reaktiven Metalls, das folgendes umfasst:

(i) ein Substrat mit einer darauf definierten Formgebungsoberfläche; und

(ii) eine Schutzbeschichtung gemäss mindestens einem der Ansprüche 1 bis 4, die auf mindestens einem Bereich der Formgebungsoberfläche abgeschieden ist.

6. Formgebungsbauteil gemäss Anspruch 5, worin das Substrat aus Stahl ist.

7. Formgebungsbauteil gemäss Anspruch 5 oder 6, worin das Formgebungsbauteil eine Druckgussform umfasst.

8. Formgebungsbauteil gemäss Anspruch 5 oder 6, das eine Druckgussform darstellt.

9. Verwendung eines Formgebungsbauteils gemäss mindestens einem der Ansprüche 5 bis 8 zur Formung eines reaktiven Metalls durch Aufrechterhalten eines Kontakts eines reaktiven Metall mit der Formgebungsoberfläche des Formgebungsbauteils für einen Zeitraum, der zur Formung des reaktiven Metalls ausreicht.

10. Verwendung gemäss Anspruch 9, worin das reaktive Metall Aluminium oder Zink oder Magnesium umfasst.

11. Verfahren zur Ausbildung einer Schutzschicht auf einem Formgebungsbauteil, das die Abscheidung einer Beschichtung von dotiertem Chromnitrid, wie in mindestens einem der Ansprüche 1 bis 4 definiert, auf mindestens einem Teil der Formgebungsoberfläche eines Substrats mit einer darauf definierten Formgebungsoberfläche durch ein physikalisches Gasphasenabscheidungs (PVD)-Verfahren umfasst.

12. Verfahren gemäss Anspruch 11, worin das Abscheidungsverfahren ein Kathodenlichtbogen-PVD-Verfahren ist.

13. Verfahren gemäss Anspruch 12, worin das Chromnitrid mit mindestens einem Übergangsmetall dotiert ist, und das PVD-Verfahren wird durchgeführt unter Verwendung einer Quelle, die Chrom und das Dotierungsmetall umfasst, und einer Arbeitsatmosphäre, die Stickstoff umfasst.

14. Verfahren gemäss Anspruch 13, worin das Dotiermittel Wolfram umfasst, und worin das Kathodenlichtbogen-PVD-Verfahren bei einem Bias von 50-75 V und einem Druck der Arbeitsatmosphäre von 20-25 mtorr durchgeführt wird.

15. Verfahren gemäss Anspruch 12, worin das Chromnitrid mit Sauerstoff dotiert ist, und worin im PVD-Verfahren eine Kathode, die im wesentlichen aus Chrom besteht, und einer Arbeitsatmosphäre, die Stickstoff und Sauerstoff umfasst, verwendet wird.

16. Verfahren gemäss Anspruch 15, worin das PVD-Verfahren durchgeführt wird bei einem Bias von 50-75 V und mit einem Arbeitsgas, das Stickstoff und Sauerstoff in einem Molverhältnis von 2:1 bei einem Druck von 20-25 mtorr umfasst.

Revendications

1. Revêtement protecteur résistant à des métaux réactifs fondus, essentiellement constitué d'une matrice de CrN ayant une épaisseur de 1 à 40 µm et dans lequel est dispersée une quantité de 1 à 10 % en atomes d'un dopant choisi parmi les métaux de transition, l'oxygène et des combinaisons de ceux-ci.

2. Revêtement selon la revendication 1, qui est polycristallin ayant une orientation cristalline aléatoire ayant une polarisation dans l'orientation cristalline 220 inférieure à 10 %.

3. Revêtement selon la revendication 1 ou 2, dans lequel le dopant est choisi parmi le tungstène, le molybdène, l'oxygène et les combinaisons de ceux-ci.

4. Revêtement selon l'une quelconque des revendications 1 à 3, ayant une épaisseur de 1 à 20 µm.

5. Elément de formage pour façonner un métal réactif, comprenant :

i) un substrat ayant une surface de formage définie sur celui-ci ; et

ii) placé sur au moins une partie de la surface de formage, un revêtement protecteur selon l'une quelconque des revendications 1 à 4.

6. Elément de formage selon la revendication 5, dans lequel le substrat est constitué d'acier.

7. Elément de formage selon la revendication 5 ou 6, dans lequel ledit élément de formage comprend un moule de moulage en coquille.

8. Elément de formage selon la revendication 5 ou 6, qui est une matrice de moulage en coquille.

9. Utilisation d'un élément de formage selon l'une quelconque des revendications 5 à 8 pour façonnage d'un métal réactif par maintien d'un métal réactif en contact avec la surface de formage de l'élément de formage pendant une durée suffisante pour former le métal réactif.

10. Utilisation selon la revendication 9, dans lequel le métal réactif comprend de l'aluminium ou du zinc ou du magnésium.

11. Procédé de façonnage d'un revêtement protecteur sur un élément de formage, comprenant le dépôt d'un revêtement de nitrure de chrome dopé selon l'une quelconque des revendications 1 à 4 sur au moins une partie de la surface de formage d'un substrat sur lequel est définie une surface de formage par un procédé de dépôt physique en phase vapeur (PVD).

12. Procédé selon la revendication 11, dans lequel le procédé de dépôt est un procédé PVD à arc cathodique.

13. Procédé selon la revendication 12, dans lequel le nitrure de chrome est dopé avec au moins un métal de transition, et le procédé PVD est réalisé à l'aide d'une source comprenant du chrome et le dopant métallique, et une atmosphère de travail comprenant de l'azote.

14. Procédé selon la revendication 13, dans lequel le dopant comprend du tungstène et dans lequel le procédé PVD à arc cathodique est réalisé sous une polarisation de 50 à 75 V et sous une pression de l'atmosphère de travail de 20 à 25 mtorrs.

15. Procédé selon la revendication 12, dans lequel le nitrure de chrome est dopé avec de l'oxygène, et dans lequel ledit procédé PVD emploie une cathode essentiellement constituée de chrome et une atmosphère de travail comprenant de l'azote et de l'oxygène.

16. Procédé selon la revendication 15, dans lequel ledit, procédé PVD est réalisé sous une polarisation de 50 à 75 V et avec un gaz de travail comprenant de l'azote et de l'oxygène dans un rapport molaire de 2:1 d'oxygène sous une pression de 20 à 25 mtorrs.

Drawing