(19)

(11)

EP 1 228 530 A1

(12)

(43) Date of publication: 07.08.2002 Bulletin 2002/32 (21) Application number: 00961480.1 (22) Date of filing: 31.08.2000

(51) International Patent Classification (IPC)7: H01L 23/525, H01L 23/532 (86) International application number: PCT/US0024/087 (87) International publication number: WO 0135/462 (17.05.2001 Gazette 2001/20)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 05.11.1999 US 434711 (71) Applicant: ATMEL CORPORATION San Jose,California 95131 (US)	(72) Inventors: LAM, Ken, M. Colorado Springs, CO 80906 (US) KOVATS, Julius, A. Manitou Springs, CO 80829 (US) (74) Representative: Käck, Jürgen  Kahler, Käck, Fiener,Vorderer Anger 239 86899 Landsberg/Lech 86899 Landsberg/Lech (DE)