(19)
(11) EP 1 234 063 A2

(12)

(88) Date of publication A3:
17.01.2002

(43) Date of publication:
28.08.2002 Bulletin 2002/35

(21) Application number: 00976857.3

(22) Date of filing: 02.11.2000
(51) International Patent Classification (IPC)7C23C 18/00, H01L 21/768
(86) International application number:
PCT/US0030/264
(87) International publication number:
WO 0103/2951 (10.05.2001 Gazette 2001/19)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 02.11.1999 US 163163 P
08.08.2000 US 223839 P

(71) Applicant: University of Massachusetts
Boston, MA 02108 (US)

(72) Inventors:
  • Watkins, James J.
    South Hadley, MA 01075 (US)
  • Blackburn, James M.
    Amherst, MA 01002 (US)
  • Long, David P.
    Sunderland, MA 01375 (US)
  • Lazorcik, Jason L.
    Northampton, MA 01060 (US)

(74) Representative: von Samson-Himmelstjerna, Friedrich R., Dipl.-Phys. et al
SAMSON & PARTNERWidenmayerstrasse 5
80538 München
80538 München (DE)

   


(54) CHEMICAL FLUID DEPOSITION FOR THE FORMATION OF METAL AND METAL ALLOY FILMS ON PATTERNED AND UNPATTERNED SUBSTRATES