(19)
(11) EP 1 237 178 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
25.03.2009 Bulletin 2009/13

(45) Mention of the grant of the patent:
07.01.2009 Bulletin 2009/02

(21) Application number: 01105179.4

(22) Date of filing: 02.03.2001
(51) International Patent Classification (IPC): 
H01L 21/00(2006.01)

(54)

Self-supporting adaptable metrology device

Selbsttragendes und anpassbares Messgerät

Dispositif de métrologie adaptable et autoportant

(84) Designated Contracting States:
DE FR GB IE IT

(43) Date of publication of application:
04.09.2002 Bulletin 2002/36

(73) Proprietor: ICOS VISION SYSTEMS N.V.
3001 Heverlee (BE)

(72) Inventors:
  • Marx, Eckhard
    01471 Radeburg (DE)
  • Gerhard, Detlef
    81739 München (DE)
  • Tegeder, Volker
    01474 Weissig (DE)
  • Lechner, Johannes
    80798 München (DE)

(74) Representative: Epping - Hermann - Fischer 
Patentanwaltsgesellschaft mbH Ridlerstraße 55
80339 München
80339 München (DE)


(56) References cited: : 
EP-A- 0 377 464
US-A- 4 852 516
 US-A- 4 715 921
US-A- 6 053 687
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).