METHOD OF POLISHING OR PLANARIZING A SUBSTRATE

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EP 1 242 557 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	01.02.2006 Bulletin 2006/05

(45)	Mention of the grant of the patent:
	26.10.2005 Bulletin 2005/43

(21)	Application number: 00986423.2

(22)	Date of filing: 15.12.2000

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International Patent Classification (IPC):

C09K 3/14^(1968.09)
C09G 1/02^(1968.09)

H01L 21/306^(1974.07)

(86)	International application number:
	PCT/US2000/034058

(87)	International publication number:
	WO 2001/044402 (21.06.2001 Gazette 2001/25)

(54)	METHOD OF POLISHING OR PLANARIZING A SUBSTRATE VERFAHREN ZUM POLIEREN ODER PLANARISIEREN EINES SUBSTRATS PROCEDE SERVANT A POLIR OU A REGULARISER LA SURFACE D'UN SUBSTRAT

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

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Priority:

17.12.1999 US 172540 P

(43)	Date of publication of application:
	25.09.2002 Bulletin 2002/39

(73)	Proprietor: Cabot Microelectronics Corporation
	Aurora, IL 60504 (US)

(72)	Inventors:
	DIRKSEN, James, A. Oswego, IL 60543 (US) BOLDRIDGE, David, W. Oswego, IL 60543 (US) GROVER, Gautam S Aurora, Illinois 60504 (US)

(74)	Representative: Trueman, Lucy Petra
	Barker Brettell, 138 Hagley Road, Edgbaston Birmingham B16 9PW Birmingham B16 9PW (GB)

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References cited: :

WO-A-99/64527
US-A- 5 226 930
US-A- 5 767 016

US-A- 4 664 679
US-A- 5 352 277

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).