| (84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
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Designated Extension States: |
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AL LT LV MK RO SI |
| (30) |
Priority: |
15.11.1999 US 440235
16.11.1999 US 441694
|
| (71) |
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. |
|
Danbury, CT 06810 (US) |
|
| (72) |
Inventors: |
|
- HENDRIX, Bryan, C.
Danbury, CT 06810 (US)
- BAUM, Thomas, H.
New Fairfield, CT 06812 (US)
- DESROCHERS, Debra
Brookfield, CT 06812 (US)
- ROEDER, Jeffrey, F.
Brookfield, CT 06804 (US)
- PAW, Witold
New Fairfield, CT 06812 (US)
|
| (74) |
Representative: Harrison, Robert J., Ph. D. |
|
Patentanwälte Huber & Schüssler,Truderinger Strasse 246
81825 München
81825 München (DE) |
|
