(19)

(11)

EP 1 243 025 A2

(12)

(88) Date of publication A3: 29.11.2001 (43) Date of publication: 25.09.2002 Bulletin 2002/39 (21) Application number: 00967264.3 (22) Date of filing: 02.10.2000

(51) International Patent Classification (IPC)7: H01L 23/13 (86) International application number: PCT/US0027/206 (87) International publication number: WO 0102/4259 (05.04.2001 Gazette 2001/14)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 30.09.1999 US 156739 P (71) Applicant: Alpha Industries, Inc. Woburn, MA 01801 (US)	(72) Inventor: TABRIZI, Behnam Marlborough, MA 01752 (US) (74) Representative: Froud, Clive  Elkington and FifeProspect House8 Pembroke Road Sevenoaks, Kent TN13 1XR Sevenoaks, Kent TN13 1XR (GB)