(19)
(11) EP 1 244 907 A1

(12)

(43) Date of publication:
02.10.2002 Bulletin 2002/40

(21) Application number: 00991438.3

(22) Date of filing: 22.12.2000
(51) International Patent Classification (IPC)7: G01N 27/72
(86) International application number:
PCT/US0035/358
(87) International publication number:
WO 0104/6684 (28.06.2001 Gazette 2001/26)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 23.12.1999 US 172080 P
07.08.2000 US 633800
07.08.2000 US 633198

(71) Applicant: KLA-Tencor Corporation
San Jose, CA 95134-1809 (US)

(72) Inventors:
  • LEHMAN, Kurt, R.
    Menlo Park, CA 94025 (US)
  • LEE, Shing, M.
    Fremont, CA 94539 (US)
  • JOHNSON, Walt
    San Jose, CA 95134-1809 (US)
  • FIELDEN, John
    San Jose, CA 95134-1809 (US)
  • ZHAO, Guoheng
    Milpitas, CA 95035 (US)
  • NIKOONAHAD, Mehrdad
    Menlo Park, CA 94025 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) IN-SITU METALIZATION MONITORING USING EDDY CURRENT MEASUREMENTS AND OPTICAL MEASUREMENTS