(19)
(11)
EP 1 245 037 A1
(12)
(43)
Date of publication:
02.10.2002
Bulletin 2002/40
(21)
Application number:
00961972.7
(22)
Date of filing:
20.09.2000
(51)
International Patent Classification (IPC)
7
:
H01J
37/32
(86)
International application number:
PCT/US0025/725
(87)
International publication number:
WO 0105/0496
(
12.07.2001
Gazette 2001/28)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
(30)
Priority:
04.01.2000
US 477515
(71)
Applicant:
ADVANCED MICRO DEVICES INC.
Sunnyvale,California 94088-3453 (US)
(72)
Inventor:
EVANS, Allen, Lewis
Austin, TX 78745 (US)
(74)
Representative:
Picker, Madeline Margaret et al
Brookes Batchellor102-108 Clerkenwell Road
London EC1M 5SA
London EC1M 5SA (GB)
(54)
AUTOMATED HIGH-DENSITY PLASMA (HDP) WORKPIECE TEMPERATURE CONTROL