(19)
(11) EP 1 245 037 A1

(12)

(43) Date of publication:
02.10.2002 Bulletin 2002/40

(21) Application number: 00961972.7

(22) Date of filing: 20.09.2000
(51) International Patent Classification (IPC)7H01J 37/32
(86) International application number:
PCT/US0025/725
(87) International publication number:
WO 0105/0496 (12.07.2001 Gazette 2001/28)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 04.01.2000 US 477515

(71) Applicant: ADVANCED MICRO DEVICES INC.
Sunnyvale,California 94088-3453 (US)

(72) Inventor:
  • EVANS, Allen, Lewis
    Austin, TX 78745 (US)

(74) Representative: Picker, Madeline Margaret et al
Brookes Batchellor102-108 Clerkenwell Road
London EC1M 5SA
London EC1M 5SA (GB)

   


(54) AUTOMATED HIGH-DENSITY PLASMA (HDP) WORKPIECE TEMPERATURE CONTROL