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(11) | EP 1 246 216 A3 |
| (12) | EUROPEAN PATENT APPLICATION |
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| (54) | Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method |
| (57) Signal lines (5a, 5b) formed on a fixed substrate 1 are arranged on the same straight
line. A movable substrate (2) is elastically supported on the fixed substrate (1)
through beam portions (11) provided at two positions which are point-symmetrical with
each other with a movable contact (16) centered thereon. At least portions opposing
the signal lines (5a, 5b) are removed from the movable substrate (2). The movable
contact (16) is elastically supported at two points that are orthogonal to the straight
line on which the signal lines (5a, 5b) are arranged and do not face the signal lines
(5a, 5b). A pair of protrusions 17 are formed at positions at which after closing
the contacts, if a voltage were applied between the fixed electrode 4 and the movable
electrode 12 without the protrusion, the fixed substrate 1 and the movable substrate
2 would contact each other following the contact between the fixed contact 7 and the
movable contact 16, in a point-symmetrical manner with the movable contact 16 centered
thereon. With this arrangement, it is possible to provide an electrostatic micro-relay
which has a simple and small-size structure that is easily manufactured at low costs,
and is superior in high-frequency characteristics with a suitable contact release
force. |