(19)
(11) EP 1 249 521 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
03.05.2006 Bulletin 2006/18

(45) Mention of the grant of the patent:
11.01.2006 Bulletin 2006/02

(21) Application number: 00956968.2

(22) Date of filing: 06.09.2000
(51) International Patent Classification (IPC): 
C30B 29/36(2006.01)
C30B 23/00(2006.01)
C30B 25/00(2006.01)
C30B 25/20(2006.01)
 H01L 21/205(2006.01)
C30B 23/02(2006.01)
C30B 25/02(2006.01)
(86) International application number:
PCT/JP2000/006057
(87) International publication number:
WO 2001/046500 (28.06.2001 Gazette 2001/26)

(54)

SiC SINGLE CRYSTAL AND METHOD FOR GROWING THE SAME

SIC-EINKRISTALL UND HERSTELLUNGSVERFAHREN DAFÜR

MONOCRISTAL EN SIC ET SON PROCEDE DE CROISSANCE

(84) Designated Contracting States:
DE FR GB SE

(30) Priority: 22.12.1999 JP 36459399

(43) Date of publication of application:
16.10.2002 Bulletin 2002/42

(73) Proprietors:
  • Sixon Inc.
    Kyoto 615-0065 (JP)
  • Kansai Electric Power C.C., Inc.
    Osaka-shi, Osaka (JP)
  • MITSUBISHI CORPORATION
    Tokyo 100-8086 (JP)
  • Sumitomo Electric Industries, Ltd.
    Osaka-shi, Osaka 541-0041 (JP)

(72) Inventors:
  • SHIOMI, Hiromu
    Suita-shi, Osaka 564-0004 (JP)
  • KIMOTO, Tsunenobu
    Fushimi-ku, Kyoto-shi, Kyoto 612-8031 (JP)
  • MATSUNAMI, Hiroyuki
    Yawata-shi, Kyoto 614-0000 (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)


(56) References cited: : 
EP-A- 1 233 085
JP-A- 10 017 399
 EP-A- 1 243 674
US-A- 5 958 132
   
  • J. YANG ET AL.: 'Sublimation growth of 6H-SiC crystals on different faces of a 6H-SiC seed' INST. PHYS. CONF. SER. vol. 137, 1994, pages 17 - 20, CHAPTER 1, XP002934216
  • Z.Y. CHEN ET AL.: 'Specular surface morphology of 4H-SiC epilayers grown on (1120) face' JPN. J. APPL. PHYS. vol. 38, no. 12A, PART 2, 01 December 1999, pages L1375 - L1378, XP002934217
 
Remarks:
The file contains technical information submitted after the application was filed and not included in this specification
 
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).