......DE....FRGB..........SE....................................................JDIM360 (Ver 1.5 21 Nov 2005) - 2999001/0The file contains technical information submitted after the application was filed and not included in this specification1249521CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120060503W10000000073deBibliographieenBibliographyfrBibliographieEP00956968.2200009062002061820030407jaenen3645939919991222JP2006050320061820021016200242200601112006022005072520060503200618C30B 29/36 20060101AFI20010705BHEP H01L 21/205 20060101ALI20021218BHEP C30B 23/00 20060101ALI20021218BHEP C30B 23/02 20060101ALI20021218BHEP C30B 25/00 20060101ALI20021218BHEP C30B 25/02 20060101ALI20021218BHEP C30B 25/20 20060101ALI20021218BHEP deSIC-EINKRISTALL UND HERSTELLUNGSVERFAHREN DAFÜRenSiC SINGLE CRYSTAL AND METHOD FOR GROWING THE SAMEfrMONOCRISTAL EN SIC ET SON PROCEDE DE CROISSANCEEP-A- 1 233 085EP-A- 1 243 674JP-A- 10 017 399US-A- 5 958 132J. YANG ET AL.: 'Sublimation growth of 6H-SiC crystals on different faces of a 6H-SiC seed' INST. PHYS. CONF. SER. vol. 137, 1994, pages 17 - 20, CHAPTER 1, XP002934216Z.Y. CHEN ET AL.: 'Specular surface morphology of 4H-SiC epilayers grown on (1120) face' JPN. J. APPL. PHYS. vol. 38, no. 12A, PART 2, 01 December 1999, pages L1375 - L1378, XP0029342172002122703SHIOMI, Hiromu1-6-19, HaramachiSuita-shi, Osaka 564-0004JPKIMOTO, Tsunenobu1-39-605, Matsudaira Chikuzen, Momoyama-choFushimi-ku, Kyoto-shi, Kyoto 612-8031JPMATSUNAMI, Hiroyuki1-9, Nishiyama AdachiYawata-shi, Kyoto 614-0000JPSixon Inc.0317159193 495 a/jme27-1 Hideri-cho, Saiin Ukyo-ku, Kyoto-shiKyoto 615-0065JPKansai Electric Power C.C., Inc.0430180093 495 a/jme3-22, Nakanoshima 3-chome, Kita-kuOsaka-shi, OsakaJPMITSUBISHI CORPORATION0065351493 495 a/jme6-3 Marunouchi 2-chome, Chiyoda-kuTokyo 100-8086JPSumitomo Electric Industries, Ltd.0027901793 495 a/jme5-33, Kitahama 4-chome Chuo-kuOsaka-shi, Osaka 541-0041JPHOFFMANN EITLE00101511Patent- und Rechtsanwälte Arabellastrasse 481925 MünchenDEDEFRGBSEJP200000605720000906jaWO200104650020010628200126