(19)

(11)

EP 1 250 712 A2

(12)

(88) Date of publication A3: 03.01.2002 (43) Date of publication: 23.10.2002 Bulletin 2002/43 (21) Application number: 01904990.7 (22) Date of filing: 19.01.2001

(51) International Patent Classification (IPC)7: H01L 21/306, H01L 21/00 (86) International application number: PCT/US0102/119 (87) International publication number: WO 0105/4181 (26.07.2001 Gazette 2001/30)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 22.01.2000 US 490162 (71) Applicant: Loxley, Ted Albert Wellston, OH 45692 (US)	(72) Inventor: Loxley, Ted Albert Wellston, OH 45692 (US) (74) Representative: Pratt, David Martin et al Withers & Rogers,Goldings House,2 Hays Lane London SE1 2HW London SE1 2HW (GB)