| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
19.11.1999 US 166662 P
|
| (71) |
Applicants: |
|
- Nano Scale Surface Systems, Inc.
Alameda,California 94501 (US)
- ASML US, Inc.
Scott Valley,California 95066 (US)
|
|
| (72) |
Inventors: |
|
- FELTS, John
Alameda, CA 94501 (US)
- LOPATA, Eugene, S.
Scotts Valley, CA 95066 (US)
|
| (74) |
Representative: Setna, Rohan P. et al |
|
Boult Wade TennantVerulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
|
