(19)
(11) EP 1 252 366 A2

(12)

(88) Date of publication A3:
10.01.2002

(43) Date of publication:
30.10.2002 Bulletin 2002/44

(21) Application number: 00977837.4

(22) Date of filing: 20.11.2000
(51) International Patent Classification (IPC)7: C23C 18/14, H01L 21/368, G03F 7/00, H01L 21/36
(86) International application number:
PCT/IL0000/773
(87) International publication number:
WO 0103/8940 (31.05.2001 Gazette 2001/22)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 24.11.1999 IL 13311599

(71) Applicant: YEDA RESEARCH AND DEVELOPMENT Co. LTD.
Rehovot 76100 (IL)

(72) Inventors:
  • ELBAUM, Michael
    64923 Tel-Aviv (IL)
  • ZBAIDA, David
    53520 Givataim (IL)
  • KLEIN, Eugenia
    76482 Rehovot (IL)
  • LACHISH-ZALAIT, Aurelie
    79845 Bnei Ayish (IL)

(74) Representative: VOSSIUS & PARTNER 
Siebertstrasse 4
81675 München
81675 München (DE)

   


(54) METHOD FOR SURFACE PATTERNING USING A FOCUSED LASER