(84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
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Designated Extension States: |
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AL LT LV MK RO SI |
(30) |
Priority: |
26.04.2001 JP 2001130099 24.07.2001 JP 2001222800 24.07.2001 JP 2001222801 24.07.2001 JP 2001222802 25.07.2001 JP 2001224810
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(71) |
Applicant: MITSUBISHI MATERIALS CORPORATION |
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Chiyoda-ku, Tokyo (JP) |
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(72) |
Inventors: |
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- Horiike, Nobukazu, Mitsubishi Materials Corp.
Yuuki-gun, Ibaraki-ken (JP)
- Kitajima, Jun, Mitsubishi Materials Corp.
Yuuki-gun, Ibaraki-ken (JP)
- Ikenaga, Kouichi, Mitsubishi Materials Corp.
Yuuki-gun, Ibaraki-ken (JP)
- Shimomura, Hiroshi, Mitsubishi Materials Corp.
Yuuki-gun, Ibaraki-ken (JP)
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(74) |
Representative: HOFFMANN - EITLE |
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Patent- und Rechtsanwälte Arabellastrasse 4 81925 München 81925 München (DE) |
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